Small thermal gas mass flow meter

This thermal mass flow meter is designed for precise measurement of low flow rates of dry gases, covering multiple models from MF30 to MF61, with pipe diameters from DN8 to DN40. It features a wide measuring range (e.g., 0.5~2000 NL/min), a range ratio of 1:100, and high accuracy up to ±(1.0+0.2FS). It is pressure resistant up to 1.0-2.0 MPa. Constructed from aluminum alloy/stainless steel, it supports 4-20mA/RS485 output, 24VDC power supply, and offers a variety of interface types. It is suitable for various gases such as oxygen, helium, and compressed air, providing accurate measurement solutions for multiple industries.

Technical Specifications & Engineering Parameters

Measurement Principle	MEMS micro-thermal mass flow sensor chip technology
Applicable Pipe Size	Micro pipeline DN3, DN6, DN8, DN10 (1/8", 1/4", 3/8")
Measuring Flow Range	0-50 sccm up to 0-100 SLPM (Standard Liters Per Minute)
Measurement Accuracy	±1.0% F.S. with excellent zero-point stability
Applicable Gases	Dry clean gases: Air, N2, O2, Argon, CO2, Helium, Hydrogen
Operating Pressure	Max 1.0 MPa (10 bar) / 1.6 MPa
Gas Temperature Range	0°C to +50°C (Ambient 0°C to +60°C)
Response Time	Fast response time: < 50 milliseconds
Output Signals	Linear 0-5V / 0-10V DC, 4-20mA analog, Digital RS485 Modbus
Process Connections	Double ferrule tube fittings (1/4", 6mm, 8mm) or push-in quick connectors
Power Supply	12V to 24V DC regulated power supply, consumption < 2W